|The microscope has been designed as a modular
system so that its components readily adapt to most existing mask aligner instrumentation
for quality control and production operations. Components consist of an optical head,
choice of binocular or trinocular bodies, focusing mechanism, fiber optic light guides
that may be used with various types of illuminators, and a choice of different power
eyepieces and objectives that give a magnification from 35X to 400X.
15912 Optical Head (1X): Erecting and image-splitting prism system with control
knob to select percentage of split-field viewing in any range form 50/50%, to viewing only
right-side or left-side images; focusing ring to obtain sharp focus of split-image line
separating the two fields of view; push-pull control knobs for each objective holder to
adjust objectives separation from 24mm to 110mm; knob to focus left-side objective holder
to adjust objective separations from 24mm to 110mm; knob to focus left-side objective;
precentered ring mount with lockscrew to accept accessory binocular or trinocular body;
two adjustable aperture diaphragms with connectors for accessory fiber optic light guides;
dovetail slideway for optional focusing mechanism (or slideway may be used to mount
optical head directly onto aligners that have built-in provision for vertical focusing).
15913 Focusing Mechanism: Rack and pinion
coarse focus controls, and separate precision micrometer-screw fine focus controls
graduated in 0.0001mm (one micron) divisions. With dovetail (to fit into dovetail slideway
of optical head). Complete focusing mechanism supplied on four-hole plate for convenient
mounting on aligners and other fixtures.
Body: An inclined binocular body is
offered for visual observations only, or a trinocular body that combines binocular visual
observations plus a built-in vertical monocular tube to use with optional CCTV and
photomicrographic camera systems. Both bodies are supplied with bayonet mounts to fit the
precentered ring mount of the optical head. Choice as follows:
15416 Inclined binocular body (1X) with interpupillary and diopter adjustments for
binocular eyepiece tubes. Without eyepieces.
15414 Trinocular body (1X) with interpupillary and diopter adjustments for inclined
binocular eyepiece tubes and with built-in vertical monocular tube. Selector knob directs
100% of illumination to binocular tubes, or 20% to binocular tubes and 80% to monocular
tube. Without eyepieces.
Eyepieces: Paired, coated eyepieces are
offered in a choice of magnifications as listed below. All have comfortable eyerelief. The
KW10XM eyepieces are designed with a threaded cell to accept accessory 19mm diameter
reticles and one of the eyepieces is furnished with a focusable eyelens to assure sharp
focus of the reticle pattern. Choice as follows:
15918 Pair P7X eyepieces (20mm field stop)
15915 Pair KW10XM eyepieces (18mm field stop)
15916 Pair KW15X eyepieces (11mm field stop)
15917 Pair KW20X eyepieces (10mm field stop)
Objectives: The paired, coated objectives
are offered in several magnifications, especially designed to fit into the objective
mounts of the optical head. Choice as follows:
15919 Paired 5X objectives, color-coded red, N.A. 0.12, working distance 18mm
15920 Paired 10X objectives, color-coded yellow, N.A. 0.30, working distance 11mm
15921 Paired 15X objectives, color-coded black, N.A. 0.25, working distance 12.5mm
Paired 20X objectives, color-coded green, N.A. 0.40, working distance 10.5mm
Fiber Optic Light Guides: These flexible light guides, approximately
14-inches long and with adapters at both ends, are designed to relay on axis illumination
to the microscope system from a separate external illuminator (not included). The adapters
at one end of the guides fit into the connectors on the optical head. Similar adapters on
the other end can be used to facilitate connection to light sources that either are built
into the aligner equipment, or available separately.
15914 Pair fiber optic light guides with adapters.
Illuminators: For those requirements where
a suitable illuminator is not already available, that can be used with the fiber optic
light guides, several types are available. These range from 6V, 12W tungsten, to 150W
halogen, depending on the needs. Request information.