Precise Focus Indicator Assures Accurate Z-Axis Measurements
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Non-Contact Measuring Microscope

The DMM3000 Allows Precise, Repeatable and Accurate Depth Measurements Without Physical Contact - Even on Difficult Samples
The DMM3000 utilizes the Vickers Instruments’ patented Precise Focus Indicator (PFI) target, designed especially for the semiconductor industry.
This indicator enables even inexperienced operators to focus accurately on reflectivity surfaces, regardless of any visible structure. Measurement of the Z-axis are achieved by first focusing accurately on the top of the relevant feature to be measured and then refocusing on the bottom. The true point of focus is reached when the two halves of the PFI target coincide. The movement in Z-axis in refocusing is the required thickness or depth on the digital readout unit.
Readout resolution allows for a precision of 1 micron.
Advantages? Non-contact measurement method prevents any physical damage to delicate samples.

To download specifications in Adobe Acrobat format, visit the Unitron library...

DMM3000 SPECIFICATIONS
ITEMS MODELS Monocular with TV C Mount Trinocular (TV C Mount Type)
DHII-M2 DHII-M3 DHII-M4 DHII-M5 DHII-M6 DHII-T2 DHII-T3 DHII-T4 DHII-T5 DHII-T6
MICROSCOPE
STAND
• Coarse focus control
120mm by rack &
pinion mechanism
• Semi-coarse focus
control measuring
range 25mm
(5.5mm/360░ rotation)
by cross roller guide
mechanism
• Fine focus control
0.1mm/360░ rotation
• Accommodates
samples 120mm
height
VIEWING HEAD Monocular with
TV C mount tube
Erect
image
Inclination
of head
20░
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Trinocular
(TV C mount tube)
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Precise
Focus
Indicator
Black graticule, white stripe
graticule & without graticule,
selectable by switch-over lever
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Reflected
Illuminator
Tungsten lamp 8V 15W
transformer built in microscope stand
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EYEPIECE NWF10X (G-14 crossline reticle) F.N.16
NWF 10X F.N.16                   
OBJECTIVE PLM10X (W.D.12.0mm)
MEASURING STAGE 505S 50 x 50mm traveler                        
505L 50 x 50mm travel (with T-slots)                   
510 100 x 50mm travel (with T-slots)                   
510D 100 x 50mm travel (with T-slots,
linear scale & X-Y counter)
reading 1Ám or 0.5 Ám
                                  
100D 100 x 100mm travel
(with rotary table, linear scale & X-Y
counter) reading 1Ám ir 0.5 Ám
                  
MICROMETERS
(X&Y)
M-50B 50 x 50mm travel
reading 5Ám (Mechanical)
               
Z-AXIS DIGITAL
INDICATOR
ID-F125 25mm range, reading 1Ám
with BCD output terminal

DMM3000 OPTIONAL ACCESSORIES
Eyepiece Reticle
(F.N.16)
G-4 micrometer scale (10mm/100), G-10 dotted & solid cross line, G-11 solid cross lines, G-12 cross lines micrometer scale (10mm/100), G-13 cross dotted lines (all reticle eyepieces are attachable to NWF10x only)
Eyepiece NWF15x (F.N.12), WF20x (F.N.9)
Objective PLM5x (N.A.0.10W.F.19.0mm), PLLWDM20x (N.A.0.40 W.D.11.2mm),
PLLWDM40x (N.A. 0.50 W.D. 10.2mm), PLM100x (N.A 0.90W.D. 0.28mm)
Revolving Nosepiece N4R Quadruple revolving nosepiece
Rotary Stage RS510 Attachable to 510 & 510D stage, reading to 2'. Stage top surface 160mm in dia, including a stage glass 105mm in dia. Provided with two T-stols for other tools.
Fiber Optic Illuminator NCL-2 15V 150W Halogen lamp, with power transformer unit (to be used with IDL-1 light guide adaptor)
Transmitted Illuminator
Lamp House
DH2-T1 6 V 20 W Halogen lamp, with cord (power transformer is built into microscope stand)
Digital Micrometer DM50-21 50 x 50mm travel, with X-Y counter, reading Ám
DM50-22 50 x 50mm travel, with X-Y counter, reading 0.2 Ám
Z-Axis
Linear Gauge
LGB-110S Up to 10mm range, rading to 1Ám or 0.5Ám using with KC-13R 3-axis digital counter and 510D/ 100D stage (instead of KC-12R
X-Y counter)
Z-Axis
Measuring Indicator
MINIAX Up to 10mm range, reading to 0.1Ám, with PH-01 measuring head,
DH-151 digital display and BCD output terminal.
Other Options Digital printer, Multi printer, Photographic camera system (35mm, Polaroid«), Auto-focus system, CCD camera, TV monitor, Filar micrometer eyepiece (10x), protractor eyepiece (10x, reading 5'), block gauge (25mm, 50mm)


All specifications subject to change without prior notice.

Site developed and maintained by
Bender Associates, Inc.
Copyright 1998 - 2008.  All rights reserved.
Revised: February 18, 2010.


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