DMM 3000

Precise Focus Indicator Assures Accurate Z-Axis Measurements

HISOMET -

Non-Contact Measuring Microscope

The DMM3000 Allows Precise, Repeatable and Accurate Depth Measurements Without Physical Contact - Even on Difficult Samples

The DMM3000 utilizes the Vickers Instruments’ patented Precise Focus Indicator (PFI) target, designed especially for the semiconductor industry.
This indicator enables even inexperienced operators to focus accurately on reflectivity surfaces, regardless of any visible structure. Measurement of the Z-axis are achieved by first focusing accurately on the top of the relevant feature to be measured and then refocusing on the bottom. The true point of focus is reached when the two halves of the PFI target coincide. The movement in Z-axis in refocusing is the required thickness or depth on the digital readout unit.
Readout resolution allows for a precision of 1 micron.
Advantages? Non-contact measurement method prevents any physical damage to delicate samples.

To download specifications in Adobe Acrobat format, visit the Unitron library...

DMM3000 SPECIFICATIONS

ITEMS

MODELS

Monocular with TV C Mount

Trinocular (TV C Mount Type)

DHII-M2

DHII-M3

DHII-M4

DHII-M5

DHII-M6

DHII-T2

DHII-T3

DHII-T4

DHII-T5

DHII-T6

MICROSCOPE
STAND

• Coarse focus control
120mm by rack &
pinion mechanism
• Semi-coarse focus
control measuring
range 25mm
(5.5mm/360° rotation)
by cross roller guide
mechanism
• Fine focus control
0.1mm/360° rotation
• Accommodates
samples 120mm
height

VIEWING HEAD

Monocular with
TV C mount tube

Erect
image
Inclination
of head
20°

Trinocular
(TV C mount tube)

Precise
Focus
Indicator

Black graticule, white stripe
graticule & without graticule,
selectable by switch-over lever

Reflected
Illuminator

Tungsten lamp 8V 15W
transformer built in microscope stand

EYEPIECE

NWF10X (G-14 crossline reticle) F.N.16

NWF 10X F.N.16

OBJECTIVE

PLM10X (W.D.12.0mm)

MEASURING STAGE

505S

50 x 50mm traveler

505L

50 x 50mm travel (with T-slots)

510

100 x 50mm travel (with T-slots)

510D

100 x 50mm travel (with T-slots,
linear scale & X-Y counter)
reading 1µm or 0.5 µm

100D

100 x 100mm travel
(with rotary table, linear scale & X-Y
counter) reading 1µm ir 0.5 µm

MICROMETERS
(X&Y)

M-50B

50 x 50mm travel
reading 5µm (Mechanical)

Z-AXIS DIGITAL
INDICATOR

ID-F125

25mm range, reading 1µm
with BCD output terminal

DMM3000 OPTIONAL ACCESSORIES

Eyepiece Reticle (F.N.16)		G-4 micrometer scale (10mm/100), G-10 dotted & solid cross line, G-11 solid cross lines, G-12 cross lines micrometer scale (10mm/100), G-13 cross dotted lines (all reticle eyepieces are attachable to NWF10x only)
Eyepiece	NWF15x (F.N.12), WF20x (F.N.9)
Objective	PLM5x (N.A.0.10W.F.19.0mm), PLLWDM20x (N.A.0.40 W.D.11.2mm), PLLWDM40x (N.A. 0.50 W.D. 10.2mm), PLM100x (N.A 0.90W.D. 0.28mm)
Revolving Nosepiece	N4R		Quadruple revolving nosepiece
Rotary Stage	RS510		Attachable to 510 & 510D stage, reading to 2'. Stage top surface 160mm in dia, including a stage glass 105mm in dia. Provided with two T-stols for other tools.
Fiber Optic Illuminator	NCL-2		15V 150W Halogen lamp, with power transformer unit (to be used with IDL-1 light guide adaptor)
Transmitted Illuminator Lamp House	DH2-T1		6 V 20 W Halogen lamp, with cord (power transformer is built into microscope stand)
Digital Micrometer	DM50-21		50 x 50mm travel, with X-Y counter, reading µm
	DM50-22		50 x 50mm travel, with X-Y counter, reading 0.2 µm
Z-Axis Linear Gauge	LGB-110S		Up to 10mm range, rading to 1µm or 0.5µm using with KC-13R 3-axis digital counter and 510D/ 100D stage (instead of KC-12R X-Y counter)
Z-Axis Measuring Indicator	MINIAX		Up to 10mm range, reading to 0.1µm, with PH-01 measuring head, DH-151 digital display and BCD output terminal.
Other Options	Digital printer, Multi printer, Photographic camera system (35mm, Polaroid®), Auto-focus system, CCD camera, TV monitor, Filar micrometer eyepiece (10x), protractor eyepiece (10x, reading 5'), block gauge (25mm, 50mm)