FS 110 System 

The FS110 Microscope can be configured to fit a wide variety
of applications from metallurgy to micro-electronic component
inspection. The large stable base accepts all Mitutoyo
Ultra Long Working Distance optics that are available, in
magnifications from 1X to 200X.

 

Features

• Reflected light only or transmitted/reflected light stand
• Large stable base and frame that accepts 6” x 6” or 8” x 8”
X/Y stages
• Plan apochromat infinity corrected strain free optics
• Ultra long working distance objectives
• Three trinocular body tube designs available
• Accepts (optional) differential interference contrast (DIC) accessories
• Slot in lamphouse mount for various filters
• Several sizes of wafer mask holders
• Selectable power input 120/220/240V AC, 50/60Hz
• Quartz halogen illumination
• Optional Brightfield/Darkfield illumination (reflected light)
• Five year Mitutoyo factory mechanical warranty; one year electrical

 

























FS110 System Diagram

Optional Accessories

10X eyepiece (Field number: 24), 2pcs./set
15X eyepiece (Field number: 16), 2pcs./set
20X eyepiece (Field number: 12), 2pcs./set
Extra-wide 10X eyepiece (Field number: 30)*
Trinocular tube, 1X (Erect image)
Trinocular tube, 1X (Inverted image)
Trinocular tube, 1X/2X switchable (Erect image)
Color filter (LB80)

Color filter (ND2)
Color filter (ND8)
Color filter (Green)
Reflected illumination unit (Bright/dark field)
Reflected illumination unit (Bright field)
Light source unit**
Revolving nosepiece w/4 lens mounts (B/D field)
Revolving nosepiece w/4 lens mounts (Bright field)
Revolving nosepiece w/5 lens mounts (Bright field)
Polarizing unit
Bright/dark field switching unit
Workstage (6"x 6"), Right-handed type
Workstage (8"x 8"), Right-handed type
Stage glass for 6"x 6" workstage
Stage glass for 8"x 8" workstage
Wafer holder (3"Dia.-6"Dia.)
Mask holder (3"x 3")
Mask holder (4"x 4")
Mask holder (5"x 5")
Mask holder (6"x 6")
Mask holder (7"x 7")
Differential interference contrast unit (100X, SL80,SL50X)
Differential interference contrast unit (50X, SL20X)
Differential interference contrast unit (20X)
Differential interference contrast unit (10X, 5X)
CCD camera mount adapter FS ULWD Objectives
PCA photomicrography unit

*Can be used with the special trinocular tube
**Light source: Halogen bulb (12V, 50W)

 

 

 
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Copyright 1998 - 2008.  All rights reserved.
Revised: February 18, 2010.


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