Wafer Inspection Accessories

SEMPREX Wafer Inspection Accessories

M8 Rotating Puck Paddle shown with 5" Wafer

Hard anodized, teflon sealed holders support wafers on precision machined flat surface
Includes cutouts for vacuum wand tools, allowing easy placement and removal of wafers
Holders are easily interchangeable using plasti-slide set -- one stage can be used for a variety of wafer sizes
For use with all Semprex X-Y stages

PART #	DESCRIPTION
13-1468.00	Paddle Alignment Stop (mounts on stage)
For 4" Stages:
13-4014.00 13-4015.00	M4 Plasti-Slide Set, Front Load M4 Plasti-Slide Set, Side Load
13-4033.00 13-4133.00 13-4233.00	M4 Paddle for 4" Wafers, Front Load M4 Paddle for 4" Wafers, Side Load M4 Rotating Puck Paddle for 4" Wafers
For 6" Stages:
13-6014.00 13-6015.00	M6 Plasti-Slide Set, Front Load M6 Plasti-Slide Set, Side Load
13-6033.00 13-6133.00 13-6035.00 13-6135.00	M6 Paddle for 4" Wafers, Front Load M6 Paddle for 4" Wafers, Side Load M6 Paddle for 6" Wafers, Front Load M6 Paddle for 6" Wafers, Side Load
13-6233.00 13-6235.00	M6 Rotating Puck Paddle for 4" Wafers M6 Rotating Puck Paddle for 6" Wafers
13-6245.02 13-2031.02	M6 Rotating Vacuum Puck Paddle for 4-6" Wafers Vacuum Chuck with Knob Rotation for 4-6" Wafers
For 8" Stages:
13-8014.00 13-8015.00	M8 Plasti-Slides, Front Load M8 Plasti-Slides for Refl. Stages, Side Load
13-8033.00 13-8035.00 13-8036.00	M8 Paddle for 4" Wafers M8 Paddle for 6" Wafers M8 Paddle w/Leveling for 8" Wafers
13-8235.00 13-8236.00	M8 Rotating Puck Paddle for 6" Wafers M8 Rotating Puck Paddle for 8" Wafers
13-8246.02 13-2041.02	M8 Rotating Vacuum Puck Paddle for 5-8" Wafers Vacuum Chuck with Knob Rotation for 5-8" Wafers

K64 stages use 13-4014 for M6 Paddles or 13-6015 for M4 Paddles.

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