Mask & Pelicle Inspection

SEMPREX Mask & Pelicle Inspection Accessories

M6 Mask Paddle & Plast-Slide
Set on M6 Stage

Hard anodized, teflon sealed holders support masks on outer edge preventing damage to sensitive surfaces
Includes cutouts for edge-grip tools, allowing easy placement and removal of masks
Holders easily interchangeable using plasti-slide set -- one stage can be used for a variety of mask sizes
For use with all Semprex transmitted light X-Y stages

PART #	DESCRIPTION
13-1468.00	Paddle Alignment Stop (mounts on stage)
For 4" Stages:
13-4014.00 13-4015.00	M4 Plasti-Slide Set, Front Load M4 Plasti-Slide Set, Side Load
13-4017.00 13-4020.00	M4 Paddle for 2.5" Masks M4 Paddle for 4" Masks
For 6" Stages:
13-6014.00 13-6015.00	M6 Plasti-Slide Set, Front Load M6 Plasti-Slide Set, Side Load
13-6017.00 13-6020.00 13-6021.00 13-6022.00 13-6024.00	M6 Paddle for 2.5" Masks M6 Paddle for 4" Masks M6 Paddle for 4.5" Masks M6 Paddle for 5" Masks M6 Paddle for 6" Masks
For 8" Stages:
13-8014.00 13-8015.10	M8 Plasti-Slides, Front Load M8 Plasti-Slides for Transm. Stages, Side Load
13-8017.00 13-8022.00 13-8024.00 13-8026.00 13-8026.25 13-8028.00	M8 Paddle for 2.5" Masks M8 Paddle for 5" Masks M8 Paddle for 6" Masks M8 Paddle for 7" Masks M8 Paddle for 7.25" Round Masks w/7" Flats M8 Paddle for 8" Masks

K64 stages use 13-4014 for M6 Paddles or 13-6015 for M4 Paddles.

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